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Proceedings Paper

MEM-mirror design and analysis for tunable optical filters
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Paper Abstract

In this paper, we will show modeling of MEM-mirrors for tunable optical filters and present the simulation results using ConventorWare software. The gold-plated micro-mirror is placed on InP/Air pair structure separated by air-gap. A voltage induced electrostatic force displaces the micro-mirror. Very wide tuning range of 149 nm is observed for InP/air-gap filters at low actuation voltage of 2.5V. To carry out optical simulation we developed a JAVA program that characterizes the reflectance spectra and the tuning behavior. These mirror designs can be utilized for optical communication and sensing applications in tunable optical filters.

Paper Details

Date Published: 14 October 2004
PDF: 8 pages
Proc. SPIE 5511, Tuning the Optical Response of Photonic Bandgap Structures, (14 October 2004); doi: 10.1117/12.566892
Show Author Affiliations
Vikram Gogte, Univ. of Denver (United States)
Mohammad A. Matin, Univ. of Denver (United States)


Published in SPIE Proceedings Vol. 5511:
Tuning the Optical Response of Photonic Bandgap Structures
Philippe M. Fauchet; Paul V. Braun, Editor(s)

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