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Proceedings Paper

Development and characterization of an ultrathin rapid thermal silicon nitride for IC sensor applications
Author(s): Richard A. Williams; Louie J. Arias; Dennis W. Hess
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Paper Details

Date Published: 1 February 1992
PDF: 11 pages
Proc. SPIE 1595, Rapid Thermal and Integrated Processing, (1 February 1992); doi: 10.1117/12.56675
Show Author Affiliations
Richard A. Williams, Univ. of California/Berkeley (United States)
Louie J. Arias, Peak Systems, Inc. (United States)
Dennis W. Hess, Lehigh Univ. (United States)

Published in SPIE Proceedings Vol. 1595:
Rapid Thermal and Integrated Processing
Mehrdad M. Moslehi; Rajendra Singh; Dim-Lee Kwong, Editor(s)

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