Share Email Print

Proceedings Paper

Chemically modified ultrathin oxides fabricated by rapid thermal processing
Author(s): Atul B. Joshi; G. Q. Lo; J. Ahn; Windsor Ting; Dim-Lee Kwong
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published: 1 February 1992
PDF: 18 pages
Proc. SPIE 1595, Rapid Thermal and Integrated Processing, (1 February 1992); doi: 10.1117/12.56674
Show Author Affiliations
Atul B. Joshi, Univ. of Texas/Austin (United States)
G. Q. Lo, Univ. of Texas/Austin (United States)
J. Ahn, Univ. of Texas/Austin (United States)
Windsor Ting, Univ. of Texas/ Austin (United States)
Dim-Lee Kwong, Univ. of Texas/Austin (United States)

Published in SPIE Proceedings Vol. 1595:
Rapid Thermal and Integrated Processing
Mehrdad M. Moslehi; Rajendra Singh; Dim-Lee Kwong, Editor(s)

© SPIE. Terms of Use
Back to Top