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Proceedings Paper

Oxidation of hydrogen silsesquioxane, (HSiO3/2)n, by rapid thermal processing
Author(s): Theresa E. Gentle
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Paper Details

Date Published: 1 February 1992
PDF: 19 pages
Proc. SPIE 1595, Rapid Thermal and Integrated Processing, (1 February 1992); doi: 10.1117/12.56672
Show Author Affiliations
Theresa E. Gentle, Dow Corning Corp. (United States)

Published in SPIE Proceedings Vol. 1595:
Rapid Thermal and Integrated Processing
Mehrdad M. Moslehi; Rajendra Singh; Dim-Lee Kwong, Editor(s)

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