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Proceedings Paper

RTP for advanced CMOS process integration
Author(s): Mehrdad M. Moslehi; John Kuehne; Lino Velo; David Yin; Dick Yeakley; Steve S.H. Huang; Rhett Barry Jucha; Terence Breedijk
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Paper Details

Date Published: 1 February 1992
PDF: 14 pages
Proc. SPIE 1595, Rapid Thermal and Integrated Processing, (1 February 1992); doi: 10.1117/12.56671
Show Author Affiliations
Mehrdad M. Moslehi, Texas Instruments Inc. (United States)
John Kuehne, Texas Instruments Inc. (United States)
Lino Velo, Texas Instruments Inc. (United States)
David Yin, Texas Instruments Inc. (United States)
Dick Yeakley, Texas Instruments Inc. (United States)
Steve S.H. Huang, Texas Instruments Inc. (United States)
Rhett Barry Jucha, Texas Instruments Inc. (United States)
Terence Breedijk, Texas Instruments Inc. (United States)


Published in SPIE Proceedings Vol. 1595:
Rapid Thermal and Integrated Processing
Mehrdad M. Moslehi; Rajendra Singh; Dim-Lee Kwong, Editor(s)

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