Share Email Print
cover

Proceedings Paper

Rapid thermal annealing of ion-implanted InP, InGaAs, and InSb
Author(s): Mulpuri V. Rao
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published: 1 February 1992
PDF: 12 pages
Proc. SPIE 1595, Rapid Thermal and Integrated Processing, (1 February 1992); doi: 10.1117/12.56669
Show Author Affiliations
Mulpuri V. Rao, George Mason Univ. (United States)


Published in SPIE Proceedings Vol. 1595:
Rapid Thermal and Integrated Processing
Mehrdad M. Moslehi; Rajendra Singh; Dim-Lee Kwong, Editor(s)

© SPIE. Terms of Use
Back to Top