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Proceedings Paper

Control of polysilicon emitter interface using RTCVD
Author(s): Ahmad Kermani; Bahram Jalali
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Paper Details

Date Published: 1 February 1992
PDF: 7 pages
Proc. SPIE 1595, Rapid Thermal and Integrated Processing, (1 February 1992); doi: 10.1117/12.56668
Show Author Affiliations
Ahmad Kermani, RAPRO Technology Inc. (United States)
Bahram Jalali, AT&T Bell Labs. (United States)

Published in SPIE Proceedings Vol. 1595:
Rapid Thermal and Integrated Processing
Mehrdad M. Moslehi; Rajendra Singh; Dim-Lee Kwong, Editor(s)

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