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Proceedings Paper

Applications of surface charge analyzer for use in process control and in-line characterization of reoxidized nitrided oxide (ONO) films
Author(s): James S. Cable; Chandra Kantamneni; Izak Bencuya
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Paper Details

Date Published: 1 February 1992
PDF: 8 pages
Proc. SPIE 1595, Rapid Thermal and Integrated Processing, (1 February 1992); doi: 10.1117/12.56664
Show Author Affiliations
James S. Cable, TRW, Inc. (United States)
Chandra Kantamneni, TRW, Inc. (United States)
Izak Bencuya, Semitest Inc. (United States)

Published in SPIE Proceedings Vol. 1595:
Rapid Thermal and Integrated Processing
Mehrdad M. Moslehi; Rajendra Singh; Dim-Lee Kwong, Editor(s)

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