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Proceedings Paper

Application of modern quality improvement techniques to rapid thermal processing
Author(s): Joseph C. Davis; Ronald S. Gyurcsik; Jeng-Chang Lu; Richard H. Perkins
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Paper Details

Date Published: 1 February 1992
PDF: 13 pages
Proc. SPIE 1595, Rapid Thermal and Integrated Processing, (1 February 1992); doi: 10.1117/12.56661
Show Author Affiliations
Joseph C. Davis, North Carolina State Univ. (United States)
Ronald S. Gyurcsik, North Carolina State Univ. (United States)
Jeng-Chang Lu, North Carolina State Univ. (United States)
Richard H. Perkins, North Carolina State Univ. (United States)


Published in SPIE Proceedings Vol. 1595:
Rapid Thermal and Integrated Processing
Mehrdad M. Moslehi; Rajendra Singh; Dim-Lee Kwong, Editor(s)

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