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Proceedings Paper

Influence of pyrometer signal absorption due to process gas on temperature control in rapid thermal processing
Author(s): Julius C. Chang; Tue Nguyen; James S. Nakos; Josef W. Korejwa
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Paper Details

Date Published: 1 February 1992
PDF: 4 pages
Proc. SPIE 1595, Rapid Thermal and Integrated Processing, (1 February 1992); doi: 10.1117/12.56660
Show Author Affiliations
Julius C. Chang, IBM/General Technology Div. (United States)
Tue Nguyen, IBM/General Technology Div. (United States)
James S. Nakos, IBM/General Technology Div. (United States)
Josef W. Korejwa, IBM/General Technology Div. (United States)


Published in SPIE Proceedings Vol. 1595:
Rapid Thermal and Integrated Processing
Mehrdad M. Moslehi; Rajendra Singh; Dim-Lee Kwong, Editor(s)

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