Share Email Print
cover

Proceedings Paper

Review of rapid thermal processing: system design and applications
Author(s): Xiao-Li Xu; Jim J. Wortman; Mehmet C. Ozturk; Furman Yates Sorrell
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published: 1 February 1992
PDF: 17 pages
Proc. SPIE 1595, Rapid Thermal and Integrated Processing, (1 February 1992); doi: 10.1117/12.56659
Show Author Affiliations
Xiao-Li Xu, North Carolina State Univ. (United States)
Jim J. Wortman, North Carolina State Univ. (United States)
Mehmet C. Ozturk, North Carolina State Univ. (United States)
Furman Yates Sorrell, North Carolina State Univ. (United States)


Published in SPIE Proceedings Vol. 1595:
Rapid Thermal and Integrated Processing
Mehrdad M. Moslehi; Rajendra Singh; Dim-Lee Kwong, Editor(s)

© SPIE. Terms of Use
Back to Top