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Proceedings Paper

Modeling and control of rapid thermal processing
Author(s): Charles D. Schaper; Young Man Cho; Poogyeon Park; Stephen A. Norman; Paul Gyugyi; G. Hoffmann; S. Balemi; Stephen P. Boyd; Gregory Franklin; Thomas Kailath; Krishna C. Saraswat
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Paper Details

Date Published: 1 February 1992
PDF: 16 pages
Proc. SPIE 1595, Rapid Thermal and Integrated Processing, (1 February 1992); doi: 10.1117/12.56658
Show Author Affiliations
Charles D. Schaper, Stanford Univ. (United States)
Young Man Cho, Stanford Univ. (United States)
Poogyeon Park, Stanford Univ. (United States)
Stephen A. Norman, Stanford Univ. (United States)
Paul Gyugyi, Stanford Univ. (United States)
G. Hoffmann, Stanford Univ. (United States)
S. Balemi, Stanford Univ. (United States)
Stephen P. Boyd, Stanford Univ. (United States)
Gregory Franklin, Stanford Univ. (United States)
Thomas Kailath, Stanford Univ. (United States)
Krishna C. Saraswat, Stanford Univ. (United States)


Published in SPIE Proceedings Vol. 1595:
Rapid Thermal and Integrated Processing
Mehrdad M. Moslehi; Rajendra Singh; Dim-Lee Kwong, Editor(s)

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