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Proceedings Paper

Tessellated probe as an aid to process development
Author(s): Neil M. P. Benjamin; K. R. Krieg; Gaylen T. Grover
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Paper Details

Date Published: 1 January 1992
PDF: 9 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56656
Show Author Affiliations
Neil M. P. Benjamin, Lucas Labs. (United States)
K. R. Krieg, Lucas Labs. (United States)
Gaylen T. Grover, Lucas Labs. (United States)


Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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