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Proceedings Paper

Infrared diode laser and laser-induced fluorescence diagnostics of an electron cyclotron resonance plasma etching tool
Author(s): R. Claude Woods; R. L. McClain; L. J. Mahoney; E. A. Den Hartog; H. Persing; J. S. Hamers
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Paper Details

Date Published: 1 January 1992
PDF: 10 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56655
Show Author Affiliations
R. Claude Woods, Univ. of Wisconsin/Madison (United States)
R. L. McClain, Univ. of Wisconsin/Madison (United States)
L. J. Mahoney, Univ. of Wisconsin/Madison (United States)
E. A. Den Hartog, Univ. of Wisconsin/Madison (United States)
H. Persing, Univ. of Wisconsin/Madison (United States)
J. S. Hamers, Univ. of Wisconsin/Madison (United States)


Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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