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Proceedings Paper

Optical emission spectroscopy as a process monitor for triod ion plating with TiN
Author(s): Mohamed Boumerzoug; Peter Mascher; Douglas R. Nagy
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Paper Details

Date Published: 1 January 1992
PDF: 10 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56653
Show Author Affiliations
Mohamed Boumerzoug, McMaster Univ. (Canada)
Peter Mascher, McMaster Univ. (Canada)
Douglas R. Nagy, Liburdi Engineering Ltd. (Canada)

Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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