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Proceedings Paper

Particle spatial distributions in low-pressure discharges
Author(s): John E. Daugherty; Michael D. Kilgore; David B. Graves
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Paper Details

Date Published: 1 January 1992
PDF: 6 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56651
Show Author Affiliations
John E. Daugherty, Univ. of California/Berkeley (United States)
Michael D. Kilgore, Univ. of California/Berkeley (United States)
David B. Graves, Univ. of California/Berkeley (United States)


Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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