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Proceedings Paper

Ion velocity distributions in electron cyclotron resonance plasmas
Author(s): Richard A. Gottscho; Toshiki Nakano; Nader Sadeghi; Dennis J. Trevor; Rod W. Boswell
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Paper Details

Date Published: 1 January 1992
PDF: 6 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56650
Show Author Affiliations
Richard A. Gottscho, AT&T Bell Labs. (United States)
Toshiki Nakano, National Defense Academy (Japan)
Nader Sadeghi, Univ. Joseph Fourier and CNRS (France)
Dennis J. Trevor, AT&T Bell Labs. (United States)
Rod W. Boswell, Australian National Univ. (Australia)

Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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