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Proceedings Paper

High-resolution surface plasmon measurements: a sensitive probe for thickness and structural information of ultrathin films
Author(s): Uwe Albrecht; H. Dilger; P. Evers; Paul Leiderer
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Paper Details

Date Published: 1 January 1992
PDF: 7 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56648
Show Author Affiliations
Uwe Albrecht, Univ. Konstanz (Germany)
H. Dilger, Univ. Konstanz (Germany)
P. Evers, Univ. Konstanz (Germany)
Paul Leiderer, Univ. Konstanz (Germany)

Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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