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Proceedings Paper

Novel microspot dielectric film thickness measurement system
Author(s): David Willenborg; Susan M. Kelso; Jon L. Opsal; Jeffrey T. Fanton; Allan Rosencwaig
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Paper Details

Date Published: 1 January 1992
PDF: 12 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56646
Show Author Affiliations
David Willenborg, Therma-Wave, Inc. (United States)
Susan M. Kelso, Therma-Wave, Inc. (United States)
Jon L. Opsal, Therma-Wave, Inc. (United States)
Jeffrey T. Fanton, Therma-Wave, Inc. (United States)
Allan Rosencwaig, Therma-Wave, Inc. (United States)

Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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