Share Email Print

Proceedings Paper

Effects of feature edges on thickness readings of thin oxides
Author(s): Jon L. Opsal; David Willenborg; Jeffrey T. Fanton; Susan M. Kelso; Jim P. Simmons; Allan Rosencwaig
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Details

Date Published: 1 January 1992
PDF: 9 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56645
Show Author Affiliations
Jon L. Opsal, Therma-Wave, Inc. (United States)
David Willenborg, Therma-Wave, Inc. (United States)
Jeffrey T. Fanton, Therma-Wave, Inc. (United States)
Susan M. Kelso, Therma-Wave, Inc. (United States)
Jim P. Simmons, Therma-Wave, Inc. (United States)
Allan Rosencwaig, Therma-Wave, Inc. (United States)

Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

© SPIE. Terms of Use
Back to Top