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Proceedings Paper

Raman scattering as an in-situ optical diagnostic
Author(s): Irving P. Herman
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Paper Abstract

Raman microprobe scattering is shown to be a useful non-invasive real-time probe during thin film processing. Applications during laser-assisted processing that are relevant to microelectronics are emphasized.

Paper Details

Date Published: 1 January 1992
PDF: 8 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56643
Show Author Affiliations
Irving P. Herman, Columbia Univ. (United States)

Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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