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Proceedings Paper

Categories of process variables: robustness optimization, uniformity tuning, and mean adjustment
Author(s): Sungdo Ha; Emanuel Sachs
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Paper Details

Date Published: 1 January 1992
PDF: 12 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56636
Show Author Affiliations
Sungdo Ha, Massachusetts Institute of Technology (United States)
Emanuel Sachs, Massachusetts Institute of Technology (United States)


Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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