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Proceedings Paper

Application of thermal imaging methodology for plasma etching diagnosis
Author(s): Vipulkumar Patel; Walter F. Kosonocky; S. Ayyagari; Mehul Patel; Bawa Singh
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Paper Details

Date Published: 1 January 1992
PDF: 6 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56633
Show Author Affiliations
Vipulkumar Patel, New Jersey Institute of Technology (United States)
Walter F. Kosonocky, New Jersey Institute of Technology (United States)
S. Ayyagari, New Jersey Institute of Technology (United States)
Mehul Patel, Insight Inc. (United States)
Bawa Singh, David Sarnoff Research Ctr. (United States)


Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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