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Proceedings Paper

Application of chemometrics to optical emission spectroscopy for plasma monitoring
Author(s): Michael P. Splichal; Harold M. Anderson
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Paper Details

Date Published: 1 January 1992
PDF: 15 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56632
Show Author Affiliations
Michael P. Splichal, Univ. of New Mexico (United States)
Harold M. Anderson, Univ. of New Mexico (United States)


Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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