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Proceedings Paper

Mass spectrometric and optical emission diagnostics for rf plasma reactors
Author(s): James K. Olthoff; James R. Roberts; R. J. Van Brunt; James R. Whetstone; Mark A. Sobolewski; S. Djurovic
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Paper Abstract

Mass spectrometric and optical emission studies have been performed on argon discharges in a GEC rf reference reactor. Kinetic-energy distributions for ions produced in the sheath region are broad and exhibit structure, while ions produced in the bulk plasma exhibit narrow, featureless energy distributions. The addition of small amounts of O2 to an argon discharge significantly alters the observed positive-ion kinetic- energy distributions. Optical emission studies indicate increasing spatial non-uniformity in the plasma at higher pressures. Time-resolved optical emission studies indicate a varying relationship between the applied rf voltage and the time-varying optical emission with changing pressure and position between the electrodes.

Paper Details

Date Published: 1 January 1992
PDF: 11 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56630
Show Author Affiliations
James K. Olthoff, National Institute of Standards and Technology (United States)
James R. Roberts, National Institute of Standards and Technology (United States)
R. J. Van Brunt, National Institute of Standards and Technology (United States)
James R. Whetstone, National Institute of Standards and Technology (United States)
Mark A. Sobolewski, National Institute of Standards and Technology (United States)
S. Djurovic, Institute of Physics (Serbia and Montenegro)


Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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