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Proceedings Paper

Mass spectrometric and optical emission diagnostics for rf plasma reactors
Author(s): James K. Olthoff; James R. Roberts; R. J. Van Brunt; James R. Whetstone; Mark A. Sobolewski; S. Djurovic
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Paper Details

Date Published: 1 January 1992
PDF: 11 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56630
Show Author Affiliations
James K. Olthoff, National Institute of Standards and Technology (United States)
James R. Roberts, National Institute of Standards and Technology (United States)
R. J. Van Brunt, National Institute of Standards and Technology (United States)
James R. Whetstone, National Institute of Standards and Technology (United States)
Mark A. Sobolewski, National Institute of Standards and Technology (United States)
S. Djurovic, Institute of Physics (Serbia and Montenegro)


Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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