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Proceedings Paper

In-situ film thickness measurements for real-time monitoring and control of advanced photoresist track coating systems
Author(s): Thomas E. Metz; Richard N. Savage; Horace O. Simmons
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Paper Details

Date Published: 1 January 1992
PDF: 7 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56629
Show Author Affiliations
Thomas E. Metz, SC Technology, Inc. (United States)
Richard N. Savage, SC Technology, Inc. (United States)
Horace O. Simmons, SC Technology, Inc. (United States)


Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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