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Proceedings Paper

In-situ monitoring of DC saddle-field plasma-assisted deposition of amorphous silicon and silicon nitride
Author(s): Roman V. Kruzelecky; Mohamed Boumerzoug; Peter Mascher; Milton Harry; Stefan Zukotynski
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Paper Details

Date Published: 1 January 1992
PDF: 13 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56628
Show Author Affiliations
Roman V. Kruzelecky, McMaster Univ. (Canada)
Mohamed Boumerzoug, McMaster Univ. (Canada)
Peter Mascher, McMaster Univ. (Canada)
Milton Harry, Univ. of Toronto (Canada)
Stefan Zukotynski, Univ. of Toronto (Canada)

Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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