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Proceedings Paper

VLSI process expert diagnostic system
Author(s): Michael E. Parten; Robert F. Tyson; Atindra K. Mitra; Jerry Lovelace
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Paper Details

Date Published: 1 January 1992
PDF: 7 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56627
Show Author Affiliations
Michael E. Parten, Texas Tech Univ. (United States)
Robert F. Tyson, Texas Tech Univ. (United States)
Atindra K. Mitra, Texas Tech Univ. (United States)
Jerry Lovelace, Texas Instruments Inc. (United States)

Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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