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Proceedings Paper

Open architecture cluster tool: communication and user interface integration
Author(s): Fred Wong; George E. Zilberman
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Paper Details

Date Published: 1 January 1992
PDF: 20 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56621
Show Author Affiliations
Fred Wong, Rapro Technology Inc. (United States)
George E. Zilberman, Rapro Technology Inc. (United States)


Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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