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Proceedings Paper

Integrated deposition of TiN barrier layers in cluster tools
Author(s): J. P. Seidel; W. Wachter; William M. Triggs; Robert P. Hall
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Paper Details

Date Published: 1 January 1992
PDF: 15 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56619
Show Author Affiliations
J. P. Seidel, Balzers AG (Liechtenstein)
W. Wachter, Balzers AG (Liechtenstein)
William M. Triggs, Materials Research Corp. (United States)
Robert P. Hall, Balzers (United States)


Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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