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Proceedings Paper

Equipment improvement methodology
Author(s): Kevin Lally
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Paper Abstract

Today's advanced devices require increasing levels of process complexity. Semiconductor (SC) manufacturers are investigating higher levels of process integration using cluster tools as an approach to decrease process cycle times and increase yields.

Paper Details

Date Published: 1 January 1992
PDF: 11 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56618
Show Author Affiliations
Kevin Lally, SEMATECH/Texas Instruments Inc. (United States)


Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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