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Proceedings Paper

Fast MTF measurement of CMOS imagers at the chip level using ISO 12233 slanted-edge methodology
Author(s): Magali Estribeau; Pierre Magnan
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Paper Abstract

MTF measurement methods for imaging devices usually require the use of an optical system to project the image of the object onto the detector. So, MTF results quality strongly depends on the accuracy of the optical adjustments (alignments, focusing...). Dedicated edge patterns have been implemented at the chip level on a CMOS imager. One of them emulates the target used in the ISO 12233 slanted-edge technique and the others one are inspired by the knife-edge method. This allows to get the MTF data without optical focusing. In order to validate the results, comparisons have been made between MTF measurements using these patterns and results obtained through direct measurements with the transmissive slanted-edge target and sine target.

Paper Details

Date Published: 4 November 2004
PDF: 11 pages
Proc. SPIE 5570, Sensors, Systems, and Next-Generation Satellites VIII, (4 November 2004); doi: 10.1117/12.565503
Show Author Affiliations
Magali Estribeau, Ecole Nationale Superieure de l'Aeronautique et de l'Espace (France)
Pierre Magnan, Ecole Nationale Superieure de l'Aeronautique et de l'Espace (France)

Published in SPIE Proceedings Vol. 5570:
Sensors, Systems, and Next-Generation Satellites VIII
Roland Meynart; Steven P. Neeck; Haruhisa Shimoda, Editor(s)

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