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Proceedings Paper

Totally integrated optical measuring sensors
Author(s): Rino E. Kunz
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Paper Abstract

Various schemes are proposed for realizing compact, truly integrated optical sensors based on a single technology or at least a sequence of compatible processes for their fabrication. These totally integrated sensor modules not only eliminate the need for external components and their respective alignment, but also achieve reduced size and weight, improved stability, mass- production potential, and the possibility of single chip multi-element sensor arrays. Furthermore, they lend themselves to being incorporated into sensor networks.

Paper Details

Date Published: 1 March 1992
PDF: 16 pages
Proc. SPIE 1587, Chemical, Biochemical, and Environmental Fiber Sensors III, (1 March 1992); doi: 10.1117/12.56538
Show Author Affiliations
Rino E. Kunz, Paul Scherrer Institute Zurich (Switzerland)


Published in SPIE Proceedings Vol. 1587:
Chemical, Biochemical, and Environmental Fiber Sensors III

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