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Proceedings Paper

Mechanical bonding of two identical silicon planar refractive lenses
Author(s): Vyacheslav Yunkin; Maxim V. Grigoriev; Serguei Kuznetsov; Anatoly A. Snigirev; Irina I. Snigireva
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Paper Abstract

Si planar refractive lenses are well known and used for microfocusing and collimating synchrotron radiation. We have developed a method of X-ray lens bonding that allow to gain in a depth aperture of linear planar lenses by factor 2. Two identical Si refractive lenses were placed face-to-face with alignment precision of 3 μm and fixed by clamp. This lens system with total depth aperture of 200 μm has been tested on BM05 (ESRF, Grenoble, France) at 20 keV. Linear focusing with full width at half maximum of 8 μm and gain of 9 was measured at the distance of 270 cm from the lenses.

Paper Details

Date Published: 4 November 2004
PDF: 8 pages
Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, (4 November 2004); doi: 10.1117/12.564872
Show Author Affiliations
Vyacheslav Yunkin, Institute of Microelectronics Technology (Russia)
Maxim V. Grigoriev, Institute of Microelectronics Technology (Russia)
Serguei Kuznetsov, Institute of Microelectronics Technology (Russia)
Anatoly A. Snigirev, European Synchrotron Radiation Facility (France)
Irina I. Snigireva, European Synchrotron Radiation Facility (France)

Published in SPIE Proceedings Vol. 5539:
Design and Microfabrication of Novel X-Ray Optics II
Anatoly A. Snigirev; Derrick C. Mancini, Editor(s)

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