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Proceedings Paper

Automated FTIR grazing angle microscopy: a new approach to microspatial chemical mapping of thin films
Author(s): Frederick P. Eng; Charlene D. Shebib
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Paper Abstract

With the recent emergence of microscopes combined with FT-IR spectrometers, a new approach to micro-analyze polymer, organic, and inorganic materials has evolved. Samples with size and thickness less than 100 micrometers and 5 nanometers, respectively, can be analyzed. There are basically two types of infrared microscopes -- near normal and grazing angle of incidence. The former provides both transmission and reflectance (near normal angle of incidence) sampling modes whereas the latter focuses only on reflectance using a grazing angle of incidence. The grazing angle microscope, which is relatively more sensitive, is a better approach in analyzing or characterizing micro thin films, smears, or spots on reflective surfaces. Automation of the grazing angle microscope expands its capability further to study micro spatial chemical mapping of polymer, organic, and even inorganic thin films on reflective surfaces. The results yield the thickness map of the thin film in a microscopic scale that could not possibly or easily be achieved in the past by any analytical technique. A program with different mapping patterns such as straight lines, squares, rectangles, circles, spirals, sectors, and circular bands has been developed using an IBM PC/AT that controls both the FT-IR spectrometer and the motorized X-Y-Z and theta positioning stage of the microscope.

Paper Details

Date Published: 1 March 1992
PDF: 3 pages
Proc. SPIE 1575, 8th Intl Conf on Fourier Transform Spectroscopy, (1 March 1992); doi: 10.1117/12.56484
Show Author Affiliations
Frederick P. Eng, IBM Corp. (United States)
Charlene D. Shebib, IBM Corp. (United States)


Published in SPIE Proceedings Vol. 1575:
8th Intl Conf on Fourier Transform Spectroscopy

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