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Proceedings Paper

FTIR spectrometric investigation of tin-doped indium oxide coatings on quartz glasses
Author(s): R. Kalaehne; K. Bolick; K.-D. Schleinitz; M. Rottmann; Karl Heinz Heckner; P. Klobes
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Paper Abstract

FTIR spectra of tin-doped indium oxide (ITO) coatings on quartz substrates are interpreted by fitting model functions. ITO coatings are prepared by dc sputtering. The sputter gases contain O2, Ar, and CF4, CCl2F2 and CBr2F2, respectively. The measured thickness d of deposited ITO coatings on quartz glass substrates differs between 40 and 540 nm. Carrier concentration and mobility are estimated.

Paper Details

Date Published: 1 March 1992
PDF: 2 pages
Proc. SPIE 1575, 8th Intl Conf on Fourier Transform Spectroscopy, (1 March 1992); doi: 10.1117/12.56482
Show Author Affiliations
R. Kalaehne, Humboldt Univ. of Berlin (Germany)
K. Bolick, Humboldt Univ. of Berlin (Germany)
K.-D. Schleinitz, Humboldt Univ. of Berlin (Germany)
M. Rottmann, Humboldt Univ. of Berlin (Germany)
Karl Heinz Heckner, Humboldt Univ. of Berlin (Germany)
P. Klobes, Analytical Ctr. Berlin-Adlershof (Germany)


Published in SPIE Proceedings Vol. 1575:
8th Intl Conf on Fourier Transform Spectroscopy

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