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Proceedings Paper

Oxygen precipitate mapping in silicon using micro-FTIR spectroscopy
Author(s): Adele Sassella; Alessandro Borghesi
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Paper Abstract

We present a new high spatial resolution Fourier transform infrared technique which can detect low concentrations of SiO2 particles embedded in a silicon matrix. We use 30 micrometers diameter spots and scan the samples to obtain an optical response map of such precipitates.

Paper Details

Date Published: 1 March 1992
PDF: 2 pages
Proc. SPIE 1575, 8th Intl Conf on Fourier Transform Spectroscopy, (1 March 1992); doi: 10.1117/12.56472
Show Author Affiliations
Adele Sassella, Univ. di Pavia (Italy)
Alessandro Borghesi, Univ. di Pavia (Italy)

Published in SPIE Proceedings Vol. 1575:
8th Intl Conf on Fourier Transform Spectroscopy
Herbert Michael Heise; Ernst Heiner Korte; Heinz W. Siesler, Editor(s)

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