Share Email Print
cover

Proceedings Paper

Seeing more, looking at less: applications of IR microscopy
Author(s): Peter Grosse; Lukas Kuepper; Wolfgang Theiss
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Applications of IR microscopy in solid state physics are shown, namely, the investigations of layer thickness variations in semiconductor systems and of the scattering characteristics of small particles, both making use of the ability to take spectra from small sample spots.

Paper Details

Date Published: 1 March 1992
PDF: 2 pages
Proc. SPIE 1575, 8th Intl Conf on Fourier Transform Spectroscopy, (1 March 1992); doi: 10.1117/12.56457
Show Author Affiliations
Peter Grosse, RWTH Aachen (Germany)
Lukas Kuepper, RWTH Aachen (Germany)
Wolfgang Theiss, RWTH Aachen (Germany)


Published in SPIE Proceedings Vol. 1575:
8th Intl Conf on Fourier Transform Spectroscopy

© SPIE. Terms of Use
Back to Top