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Proceedings Paper

Submicron focusing of high-energy x-rays with Ni refractive lenses
Author(s): Anatoly A. Snigirev; Irina I. Snigireva; Marco Di Michiel; Veijo Honkimaki; Maxim V. Grigoriev; Vladimir P. Nazmov; Elena F. Reznikova; Jurgen Mohr; Volker Saile
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Paper Abstract

We report the results on experimental study of optical properties of Ni refractive lenses made by deep X-ray lithography and LIGA techniques. One- and two-dimensional lenses were tested at the ESRF ID15 beamline using wide energy spectrum from 40 keV to 220 keV. The focusing properties in terms of focal length, size of the focal spot/line and gain were studied. Sub micrometer focusing was measured in the energy range from 40 to 150 keV. The measured lens parameters were compared with ray-tracing analysis.

Paper Details

Date Published: 4 November 2004
PDF: 7 pages
Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, (4 November 2004); doi: 10.1117/12.564545
Show Author Affiliations
Anatoly A. Snigirev, European Synchrotron Radiation Facility (France)
Irina I. Snigireva, European Synchrotron Radiation Facility (France)
Marco Di Michiel, European Synchrotron Radiation Facility (France)
Veijo Honkimaki, European Synchrotron Radiation Facility (France)
Maxim V. Grigoriev, Institute of Microelectronics Technology (Russia)
Vladimir P. Nazmov, Forschungszentrum Karlsruhe GmbH (Germany)
Univ. of Karlsruhe (Germany)
Elena F. Reznikova, Forschungszentrum Karlsruhe GmbH (Germany)
Jurgen Mohr, Forschungszentrum Karlsruhe GmbH (Germany)
Volker Saile, Forschungszentrum Karlsruhe GmbH (Germany)
Univ. of Karlsruhe (Germany)


Published in SPIE Proceedings Vol. 5539:
Design and Microfabrication of Novel X-Ray Optics II
Anatoly A. Snigirev; Derrick C. Mancini, Editor(s)

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