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Proceedings Paper

Fabrication of parabolic nanofocusing x-ray lenses
Author(s): Olga Kurapova; Sebastian Feste; Malte Gather; Til Florian Gunzler; U. T. Hunger; Marion Kuhlmann; Jens Patommel; Christian G. Schroer; Bruno Lengeler; Andre van der Hart
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Paper Abstract

We have fabricated planar parabolic lenses made of silicon and boron which have a focal distance in the range of a few millimetres at hard x-ray energies. Two silicon lenses were used in a crossed geometry to generate a microbeam with a lateral size of 160x107 nm2 at 15 keV. The focus size of 180 nm at 22 keV and at a distance from the synchrotron radiation source of 42 m was obtained with boron lens. The performance of the silicon lenses was improved by optimising the e-beam lithography and the etching parameters. In addition, we report on the microfabrication process of diamond as well as pyrolytic graphite lenses.

Paper Details

Date Published: 4 November 2004
PDF: 10 pages
Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, (4 November 2004); doi: 10.1117/12.563921
Show Author Affiliations
Olga Kurapova, Aachen Univ. (Germany)
Sebastian Feste, Aachen Univ. (Germany)
Malte Gather, Aachen Univ. (Germany)
Til Florian Gunzler, Aachen Univ. (Germany)
U. T. Hunger, Aachen Univ. (Germany)
Marion Kuhlmann, Aachen Univ. (Germany)
Jens Patommel, Aachen Univ. (Germany)
Christian G. Schroer, Aachen Univ. (Germany)
Bruno Lengeler, Aachen Univ. (Germany)
Andre van der Hart, Forschungszentrum Julich (Germany)

Published in SPIE Proceedings Vol. 5539:
Design and Microfabrication of Novel X-Ray Optics II
Anatoly A. Snigirev; Derrick C. Mancini, Editor(s)

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