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Proceedings Paper

Fringe spacing in white-light interferometry
Author(s): Joanna Schmit; Paul Unruh; Der-Shen Wan
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Paper Abstract

Interference microscopes use quasi-monochromatic, broad band, and white light illumination for surface topography measurement. Fringe spacing for quasi-monochromatic illumination changes with the numerical aperture of system, and these changes have been previously examined by others. In this article we compare changes in fringe spacing for white light and broad band illumination for objectives with a numerical aperture of 0.13 and 0.55. We find that white light fringe spacing changes with tilt of the object much faster than for monochromatic illumination. We also investigate the influence of reference mirror tilt on changes in white light fringe spacing.

Paper Details

Date Published: 2 August 2004
PDF: 8 pages
Proc. SPIE 5531, Interferometry XII: Techniques and Analysis, (2 August 2004); doi: 10.1117/12.563911
Show Author Affiliations
Joanna Schmit, Veeco Instruments Inc. (United States)
Paul Unruh, Veeco Instruments Inc. (United States)
Der-Shen Wan, Veeco Instruments Inc. (United States)

Published in SPIE Proceedings Vol. 5531:
Interferometry XII: Techniques and Analysis
Katherine Creath; Joanna Schmit, Editor(s)

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