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Proceedings Paper

LVDT calibration using a phase modulation optical interferometer calibrated by an x-ray interferometer
Author(s): Jin Won Park; Jae Gun Jo; Sang Ho Byun; Jeong Eun Kim; Cheon Il Eom
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Paper Abstract

We have calibrated an LVDT using an optical and x-ray interferometer. We have calibrated optical interferometer using x-ray interferometer. The LVDT has calibrated by the optical interferometer. We made the monolithic x-ray interferometer with a double parallel spring structure for the translation of an analyzer lamella. One period of the x-ray interference fringe corresponds to the lattice parameter, 0.192 nm. The nonlinearity of optical interferometer has been calibrated by an x-ray interferometer. We have used a phase modulation optical interferometer. This calibration using the x-ray interferometer is directly traceable to primary standards. We have achieved the resolution of an x-ray interferometer and optical interferometer better than 0.01 nm. The optical phase stability of the interferometer is less than ± 150 pm. For the control of environmental temperature, we have used PID method. PID controller controlled the temperature inside chamber. Temperature drift was less than ± 3 mK (k = 2).

Paper Details

Date Published: 2 August 2004
PDF: 9 pages
Proc. SPIE 5532, Interferometry XII: Applications, (2 August 2004); doi: 10.1117/12.563895
Show Author Affiliations
Jin Won Park, Korea Research Institute of Standards and Science (South Korea)
Jae Gun Jo, Korea Research Institute of Standards and Science (South Korea)
Sang Ho Byun, Korea Research Institute of Standards and Science (South Korea)
Jeong Eun Kim, Korea Research Institute of Standards and Science (South Korea)
Cheon Il Eom, Korea Research Institute of Standards and Science (South Korea)


Published in SPIE Proceedings Vol. 5532:
Interferometry XII: Applications
Wolfgang Osten; Erik Novak, Editor(s)

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