Share Email Print
cover

Proceedings Paper

Optical properties of superthin niobium films deposited on crystalline quartz
Author(s): L. A. Kuzik; V. N. Spiridonov; V. A. Yakovlev; Guerman N. Zhizhin; Fedor A. Pudonin; Peter Grosse; B. Heinz
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Optical properties of ultrathin metal (Nb) films (1.5 angstroms - 20 angstroms) on (alpha) - quartz have been studied. On quartz the metal films were prepared by radio frequency sputtering. Such films shows metallic behavior even for the thickness of a few angstroms. Then the samples were covered by a 50 angstroms Si protective film. As was found earlier, the imaginary part of dielectric function (Im(Epsilon) ) of Nb depends on the thickness nonmonotonically and has maximum at 6 angstroms. To study this effect in more detail we have used two sets of samples with thickness increasing from sample to sample on 2 angstroms and on 1.5 angstroms. All spectra were recorded using Fourier-transform spectrometer Michelson-110 (BOMEM).

Paper Details

Date Published: 1 March 1992
PDF: 2 pages
Proc. SPIE 1575, 8th Intl Conf on Fourier Transform Spectroscopy, (1 March 1992); doi: 10.1117/12.56352
Show Author Affiliations
L. A. Kuzik, Institute of Spectroscopy (Russia)
V. N. Spiridonov, Institute of Spectroscopy (Russia)
V. A. Yakovlev, Institute of Spectroscopy (Russia)
Guerman N. Zhizhin, Institute of Spectroscopy (Russia)
Fedor A. Pudonin, Lebedev Physical Institute (Russia)
Peter Grosse, RWTH Aachen (Germany)
B. Heinz, RWTH Aachen (Germany)


Published in SPIE Proceedings Vol. 1575:
8th Intl Conf on Fourier Transform Spectroscopy

© SPIE. Terms of Use
Back to Top