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Proceedings Paper

Magnetic properties of direct current magnetron sputtered thin nickel films
Author(s): A. V. Butko; A. S. Dzhumaliev; Yu. A. Filimonov; A. V. Kozhevnikov; S. L. Vysotsky; S. N. Vasiltchenko
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Paper Abstract

The structure and magnetic properties of thin nickel films grown by direct current magnetron sputtering on GaAs(100) and Si(111) substrates were studied by means of ferromagnetic resonance (FMR) method, magnetooptic Kerr effect (MOKE), atomic force microscopy (AFM) and X-ray diffraction (XRD). Dependence of the properties on substrate location inside flame zone during deposition was shown. Possibility of changing of the films' texture by varying of potential of the substrate during deposition was shown.

Paper Details

Date Published: 28 May 2004
PDF: 6 pages
Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); doi: 10.1117/12.562663
Show Author Affiliations
A. V. Butko, Institute of Radio Engineering and Electronics (Russia)
A. S. Dzhumaliev, Institute of Radio Engineering and Electronics (Russia)
Yu. A. Filimonov, Institute of Radio Engineering and Electronics (Russia)
A. V. Kozhevnikov, Institute of Radio Engineering and Electronics (Russia)
S. L. Vysotsky, Institute of Radio Engineering and Electronics (Russia)
S. N. Vasiltchenko, Institute of Radio Engineering and Electronics (Russia)


Published in SPIE Proceedings Vol. 5401:
Micro- and Nanoelectronics 2003
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

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