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Proceedings Paper

The investigations of ferroelectric thin films in virtual measuring system
Author(s): Eugeny Ph. Pevtsov; Alexander S. Sigov; A. Pyzhova; A. Gorelov
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Paper Abstract

We designed the laboratory automation for the ferroelectric thin films investigation, which differs from analogous by open architecture. This equipment is quite adopted with hardware and software of the leading companies (e.g., GPIB boards and LabView National Instruments) in the field of measuring technique and systems of data acquisition. It makes possible to carry out measuring of basic characteristics of ferroelectrics: studying the ferroelectric hysteresis, determining pyroelectric coefficient by static and quasy-static techniques, taking magnitude of remanent polarization, measuring dielectric constants, measuring the specimen electrical conductance. The measuring system has open architecture and it is easy to readjust it to solve specific problems including applications, for example, optimization of technological processes of ferroelectric films fabrication for memory devices or uncooled focal plane arrays. Basing on this measuring system there were developed several methods which give an opportunity to improve the comprehension of processes in ferroelectric systems from physical point of view.

Paper Details

Date Published: 28 May 2004
PDF: 5 pages
Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); doi: 10.1117/12.562657
Show Author Affiliations
Eugeny Ph. Pevtsov, Moscow State Institute of Radio Engineering, Electronics & Automation (Russia)
Alexander S. Sigov, Moscow State Institute of Radio Engineering, Electronics & Automation (Russia)
A. Pyzhova, Moscow State Institute of Radio Engineering, Electronics & Automation (Russia)
A. Gorelov, Moscow State Institute of Radio Engineering, Electronics & Automation (Russia)


Published in SPIE Proceedings Vol. 5401:
Micro- and Nanoelectronics 2003

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