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Proceedings Paper

Recent progress in electron beam mastering for 100Gb/in2 and beyond
Author(s): Motohiro Furuki; Minoru Takeda; Masanobu Yamamoto; Kimihiro Saito; Masataka Shinoda; Toshihiro Fujiki; Yuichi Aki; Mitsuru Koizumi; Toshiaki Miyokawa; Masao Muto
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Paper Abstract

We improved the electron beam recorder with a differential pumping head for higher density discs and mass production. The beam diameters were improved by exchanging the aperture size of the objective lens and beam stability were also improved by adding a sound proof case. As for the performance of the improved electron beam recorder, we showed that a 104Gb/in2 (150GB capacity/layer) density disc with EFM plus modulation codes can be fabricated. We also improved the pit shape uniformity and a margin of the process by introducing the appropriate write strategy that is simulated by the Monte Carlo simulation to the recording pulses.

Paper Details

Date Published: 9 September 2004
PDF: 9 pages
Proc. SPIE 5380, Optical Data Storage 2004, (9 September 2004); doi: 10.1117/12.562121
Show Author Affiliations
Motohiro Furuki, Sony Corp. (Japan)
Minoru Takeda, Sony Corp. (Japan)
Masanobu Yamamoto, Sony Corp. (Japan)
Kimihiro Saito, Sony Corp. (Japan)
Masataka Shinoda, Sony Corp. (Japan)
Toshihiro Fujiki, Sony Corp. (Japan)
Yuichi Aki, Sony Corp. (Japan)
Mitsuru Koizumi, JEOL Ltd. (Japan)
Toshiaki Miyokawa, JEOL Ltd. (Japan)
Masao Muto, JEOL Ltd. (Japan)

Published in SPIE Proceedings Vol. 5380:
Optical Data Storage 2004
B. V. K. Vijaya Kumar; Hiromichi Kobori, Editor(s)

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