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Proceedings Paper

Effect of silicon anisotropy on mirror substrate design
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Paper Abstract

Single-crystal silicon is one of the substrate materials often used for x-ray optical components, such as mirrors and monochromators. Silicon crystal is elastically anisotropic, mechanical properties are direction dependent. Because anisotropic analysis is complicated, isotropic approximation is commonly used in the design of optical substrates. This approximation is satisfactory in most cases. However, a full anisotropic analysis is required to precisely characterize the performance of optical substrates or determine the effect of anisotropy. In this paper, single-crystal-silicon anisotropy and its effects on deformation of bendable optics are discussed. The resulting anticlastic bending is described, and a complete numerical solution as well as approximate analytical formulations, is provided. Anisotropy can be used advantageously to accentuate anticlastic bending.

Paper Details

Date Published: 18 October 2004
PDF: 7 pages
Proc. SPIE 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II, (18 October 2004); doi: 10.1117/12.561438
Show Author Affiliations
Yaming Li, Argonne National Lab. (United States)
Illinois Institute of Technology (United States)
Ali M. Khounsary, Argonne National Lab. (United States)
Illinois Institute of Technology (United States)


Published in SPIE Proceedings Vol. 5533:
Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II
Ali M. Khounsary; Udo Dinger; Kazuya Ota, Editor(s)

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