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Proceedings Paper

Angle-dependent total electron yield spectra in multilayer films for standing wave measurements
Author(s): Takeo Ejima; Yasuji Muramatsu; Hisataka Takenaka
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Paper Abstract

By analyzing angle-dependent TEY spectra measured with fluorescence spectra, the depth-dependence of the absorbed energy in a Ru/B4C reflection multilayer film was obtained as follows. The periodic multilayer structure was obtained as [Ru 24.38Å/B4C 36.57Å] and [Ru 24.06Å/B4C 36.09Å] by GIXRD and reflectance measurements respectively. The angles of incidence of the fluorescence spectra were determined as 16° and 41° using the angle dependent TEY spectra measured with the fluorescence spectra. The depth-dependence of the absorbed energy, which represents the intensity of the fluorescence spectrum, was calculated using these parameters. These results suggest that an angle-dependent TEY measurement can be used as an easy phase-determination method for standing waves that are generated by a reflection multilayer.

Paper Details

Date Published: 14 October 2004
PDF: 6 pages
Proc. SPIE 5538, Optical Constants of Materials for UV to X-Ray Wavelengths, (14 October 2004); doi: 10.1117/12.561199
Show Author Affiliations
Takeo Ejima, Tohoku Univ. (Japan)
Yasuji Muramatsu, Japan Atomic Energy Research Institute (Japan)
Hisataka Takenaka, NTT Advanced Technology Corp. (Japan)

Published in SPIE Proceedings Vol. 5538:
Optical Constants of Materials for UV to X-Ray Wavelengths
Regina Soufli; John F. Seely, Editor(s)

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