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Proceedings Paper

Near-diffraction limited coherent x-ray focusing using planar refractive lenses made of epoxy SU-8 resist
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Paper Abstract

We present results on comprehensive studies of high resolution SU-8 planar refractive lenses. Lens optical properties were investigated using coherent high energy X-ray radiation. Resolution of about 270 nm was measured for the lens consisting of 31 individual lenses at energy 14 keV. Coherent properties of the set-up permit to resolve near-focus fine structure, which is determined by tiny aberrations caused by lens imperfections close to the parabola apex. This study allows understanding as far SR deep lithography as possible can maintaine to close tolerances for lens parameters. Two-dimensional focusing crossed lenses were tested and imaging experiments in projection and imaging mode were conducted. Radiation stability test was performed and conclusions on the applicability of SU-8 lenses were done.

Paper Details

Date Published: 4 November 2004
PDF: 11 pages
Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, (4 November 2004); doi: 10.1117/12.561082
Show Author Affiliations
Irina I. Snigireva, European Synchrotron Radiation Facility (France)
Anatoly A. Snigirev, European Synchrotron Radiation Facility (France)
Michael Drakopoulos, Diamond Light Source Ltd. (United Kingdom)
Victor G. Kohn, Kurchatov Institute (Russia)
Vladimir P. Nazmov, Forschungszentrum Karlsruhe GmbH (Germany)
Univ. of Karlsruhe (Germany)
Elena F. Reznikova, Forschungszentrum Karlsruhe GmbH (Germany)
Jurgen Mohr, Forschungszentrum Karlsruhe GmbH (Germany)
Volker Saile, Forschungszentrum Karlsruhe GmbH (Germany)
Univ. of Karlsruhe (Germany)


Published in SPIE Proceedings Vol. 5539:
Design and Microfabrication of Novel X-Ray Optics II
Anatoly A. Snigirev; Derrick C. Mancini, Editor(s)

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