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Proceedings Paper

Tomographic microinterferometry as a measurement tool for 3D micro-optical phase elements
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Paper Abstract

This paper presents tomographic microinterferometry as a tool for determination of 3D refractive index distribution in optically transparent elements. Principles of method and exemplary results are obtained in laboratory system are given. Concept of insensitive for ambient influence field tomograph dedicated for fast determination of refractive index distribution is given. Decreasing of acquisition and computing time is achieved by reduction of number of views, for which measurements are taken. The influence of decreasing number of projection is analyzed in order to determine a certain compromise between the quality of n(x,y,z) reconstruction and time of measurement.

Paper Details

Date Published: 2 August 2004
PDF: 10 pages
Proc. SPIE 5532, Interferometry XII: Applications, (2 August 2004); doi: 10.1117/12.560906
Show Author Affiliations
Pawel Kniazewski, Warsaw Univ. of Technology (Poland)
Malgorzata Kujawinska, Warsaw Univ. of Technology (Poland)
Witold Gorski, Institut fur Technische Optik (Germany)

Published in SPIE Proceedings Vol. 5532:
Interferometry XII: Applications
Wolfgang Osten; Erik Novak, Editor(s)

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